AUC-460-RF Reflected Wafer Inspection Microscope
£30,495.00
Sale price
£30,495.00
Regular price
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AUC-460-RF Reflected Wafer Inspection Microscope
£30,495.00
Sale price
£30,495.00
Regular price
REFLECTED-LIGHT WAFER INSPECTION
AUC-460-RF Reflected Wafer Inspection Microscope
A stable inspection platform for semiconductor wafers and flat panel display samples, using reflected bright-field and dark-field illumination.
The AUC-460-RF is designed for industrial inspection of wafers and flat panel displays. The supplied 12-inch wafer-holder arrangement supports wafers up to 300 mm in diameter and FPD samples up to 17 inches. Its reflected-only configuration is suited to samples examined from above, with a large mechanically controlled stage for positioning and scanning.
At a glance
50×–500× magnification · reflected bright-field/dark-field · 12 × 14 inch stage · 300 mm maximum wafer diameter · 17 inch maximum FPD size
Inspection features
- Bright-field and dark-field reflected illumination with an electrically adjustable aperture diaphragm that matches the selected objective.
- 50×–500× magnification using the supplied 10× eyepieces and objective set.
- Tilting trinocular head: 0–35° adjustment, erect image and 50–76 mm interpupillary range; selectable 100:0 or 0:100 light split.
- Motorised sextuple nosepiece: electric forward/reverse controls, DIC slot and repeatable objective selection.
- Stable frame: low-centre metal construction with six levelling feet to help maintain image stability.
- Front controls: conveniently positioned electrical controls for the nosepiece and aperture diaphragm.
- Quick stage movement: clutch-operated rapid movement with a linear guide for controlled positioning.
Standard specification
| Optical system | Infinity colour-corrected optical system |
|---|---|
| Eyepieces | High-eyepoint PL10×/25 mm wide-field plan eyepieces with adjustable dioptre |
| Standard objectives | 5× BD semi-apochromatic, NA 0.15, WD 13.5 mm; 10× BD semi-apochromatic, NA 0.30, WD 9 mm; 20× ultra-long-working-distance, NA 0.40, WD 8.5 mm; 50× infinity long-working-distance, NA 0.55, WD 7.5 mm |
| Reflected illuminator | Bright-field/dark-field reflected illumination; centre-adjustable electric variable aperture; filter and polarising slots; 12 V / 100 W halogen light source listed in the standard outfit |
| Stage | 12 × 14 inch three-layer mechanical stage; 420 × 710 mm size; 305 × 356 mm movement; metal stage plate for reflected inspection |
| Focusing | Low-position coaxial focusing; 35 mm coarse range; 0.001 mm fine-focus precision; upper limit and tension adjustment |
| Power and camera connection | 100–240 V power system; adjustable-focus 0.65× C-mount adapter |
| Polarisation | Polariser and 360° rotatable analyser in the standard outfit |
Software and included accessories
Supplied with MvImage-Industry image and measurement software with dongle, a colour-balance plate for reflected illumination, and M4/M6 hexagonal spanners. The software supports image capture and analysis. A camera is not included in the standard specification; the 0.65× C-mount adapter is supplied to connect a compatible camera.
Optional configuration
- Rotating 12-inch wafer workbench for 6, 8 or 12 inch wafer plates.
- Additional objectives, including 20×, 50× and 100× options in alternative optical designs.
- Blue (≤480 nm), green (520–570 nm) and red (630–750 nm) reflected-light interference filters.
- DIC kits and alternative C-mount adapters (0.35×, 0.5× or 1×).
- Reticle eyepieces and other measurement accessories.
Auckland Scientific 3-year warranty
Supplied with an Auckland Scientific 3-year warranty (conditions apply).
Need advice choosing a wafer inspection microscope?
Call Auckland Scientific to discuss your wafer or FPD size, illumination needs and camera setup. If you need both transmitted and reflected illumination, ask us about the AUC-460-TRF.