AUC-460-TRF Transmitted and Reflected Wafer Inspection Microscope

Inspect wafer and flat panel display samples with transmitted and reflected illumination in one large-format industrial microscope system.

The AUC-460-TRF is designed for semiconductor wafer and flat panel display inspection when both transmitted and reflected viewing are required. The supplied 12-inch wafer-holder arrangement supports wafers up to 300 mm in diameter and FPD samples up to 17 inches. Upper and lower illumination can be controlled independently to suit the sample and inspection method.

At a glance

50×–500× magnification · transmitted and reflected bright-field/dark-field · 12 × 14 inch stage · 300 mm maximum wafer diameter · 17 inch maximum FPD size

Inspection features

Two illumination paths: reflected bright-field/dark-field and transmitted illumination, with independent control of upper and lower light.
50×–500× magnification using the supplied 10× eyepieces and objective set.
Tilting trinocular head: 0–35° adjustment, erect image and 50–76 mm interpupillary range; selectable 100:0 or 0:100 light split.
Motorised sextuple nosepiece: electric forward/reverse controls, DIC slot and repeatable objective selection.
Stable frame: low-centre metal construction with six levelling feet to help maintain image stability.
Front controls: conveniently positioned electrical controls for the nosepiece and reflected-light aperture diaphragm.
Quick stage movement: clutch-operated rapid movement with a linear guide for controlled positioning.

Standard specification

Optical system	Infinity colour-corrected optical system
Eyepieces	High-eyepoint PL10×/25 mm wide-field plan eyepieces with adjustable dioptre
Standard objectives	5× BD semi-apochromatic, NA 0.15, WD 13.5 mm; 10× BD semi-apochromatic, NA 0.30, WD 9 mm; 20× ultra-long-working-distance, NA 0.40, WD 8.5 mm; 50× infinity long-working-distance, NA 0.55, WD 7.5 mm
Reflected illumination	Bright-field/dark-field reflected illuminator; centre-adjustable electric variable aperture; filter and polarising slots
Transmitted illumination	5 W cool-colour LED transmission illumination; warm-colour option available; upper and lower illumination independently controlled
Stage	12 × 14 inch three-layer mechanical stage; 420 × 710 mm size; 305 × 356 mm movement; glass stage plate for transmitted and reflected use
Focusing	Low-position coaxial focusing; 35 mm coarse range; 0.001 mm fine-focus precision; upper limit and tension adjustment
Power and camera connection	100–240 V power system; adjustable-focus 0.65× C-mount adapter
Polarisation	Polariser and 360° rotatable analyser in the standard outfit

Software and included accessories

Supplied with MvImage-Industry image and measurement software with dongle, a colour-balance plate for reflected illumination, and M4/M6 hexagonal spanners. The software supports image capture and analysis. A camera is not included in the standard specification; the 0.65× C-mount adapter is supplied to connect a compatible camera.

Optional configuration

Rotating 12-inch wafer workbench for 6, 8 or 12 inch wafer plates.
Additional objectives, including 20×, 50× and 100× options in alternative optical designs.
Blue (≤480 nm), green (520–570 nm) and red (630–750 nm) reflected-light interference filters.
DIC kits and alternative C-mount adapters (0.35×, 0.5× or 1×).
Reticle eyepieces and other measurement accessories.

Auckland Scientific 3-year warranty

Supplied with an Auckland Scientific 3-year warranty (conditions apply).

Need advice choosing a wafer inspection microscope?

Call Auckland Scientific to discuss your wafer or FPD size, illumination needs and camera setup. We can help you compare this transmitted/reflected system with the reflected-only AUC-460-RF.

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AUC-460-TRF Transmitted & Reflected Wafer Inspection Microscope