Evident MX63L Wafer Inspection Microscope
Price on Request — please request a quotation below.
EVIDENT | INDUSTRIAL MICROSCOPY
MX63L Wafer Inspection Microscope
A configurable industrial microscope for wafer, circuit-board and flat-panel inspection. The MX63L accommodates wafers up to 300 mm with the appropriate stage and holder, combining large-sample handling with a choice of reflected-light observation techniques.
Price on RequestSpeak to a Microscopy Specialist
Michael Hallewell offers over 21 years of microscopy experience. Discuss your specimens, workflow and imaging requirements so we can specify a suitable MX63L system.
Discuss Your MX63L Configuration →Key Features & Benefits
Select holders and stage accessories for your wafer diameter and substrate format. The MX63L platform supports up to 300 mm wafers in the specified configuration.
Compatible motorised nosepieces support repeatable objective changes while the operator uses the stage controls.
Brightfield and darkfield can be extended with DIC, simple polarisation, fluorescence, infrared and MIX using the correct components.
A dedicated transmitted-light unit and compatible stage enable suitable transparent specimens to be examined.
Technical Specifications
| Manufacturer / model | Evident (Olympus microscopy) / MX63L |
|---|---|
| Optical system | UIS2 infinity-corrected |
| Maximum wafer diameter | 300 mm with appropriate stage and holder |
| Stage travel | 356 × 305 mm with MX-SIC1412R2 |
| Maximum focus load | 15 kg INCLUDING stage and holder |
| Focus stroke | 32 mm |
| Fine focus | 100 µm per turn; 1 µm minimum graduation |
| Viewing | FN22 or FN26.5 with compatible observation tube |
| Nosepiece | Compatible motorised five- or six-position types |
| Reflected illumination | White LED with Light Intensity Manager; motorised aperture diaphragm |
| Transmitted light | Optional MX-TILLA / MX-TILLB and compatible source, guide and stage |
| MIX / infrared | Dedicated components required; not included as standard |
| Pricing | Price on Request — configured to your application |
Manufacturer specifications describe the stated model and optical combinations. Optional accessories are not included unless itemised in your quotation. Manufacturer photographs may show optional accessories and alternative configurations.
Typical Applications
Semiconductor wafer inspection, PCB examination, flat-panel displays and large industrial samples.
Configure Your MX63L
Provide wafer diameter, substrate type, sample weight, inspection methods, imaging requirements and any automation interface needed. Load limits include the stage and holder. Wafer loading equipment is quoted separately and compatibility must be confirmed.
Your quotation will identify the microscope body, optical components, illumination and any imaging accessories, together with delivery, installation and training arrangements. Please include existing equipment details if you need to reuse components.
Evident Technical Resources
Use Auckland Scientific's Technical Resource Centre to review the manufacturer literature and supporting resources before choosing your configuration.
Official MX63L Brochure
Review model information, optical options and the manufacturer system specifications.
View / Download Brochure →Video Library
Browse industrial microscope demonstrations in our video library.
Browse Manufacturer Videos →Objective Selection
Explore objective parameters in our Objective Finder. Compatibility, contrast accessories and the final optical configuration will be confirmed before supply.
Open Objective Finder →Visit Evident Technical Resources →
Why Choose Auckland Scientific?
Auckland Scientific is a UK-based, family-run supplier of microscopes, scientific instruments and specialist laboratory equipment.
With over 21 years of experience in microscopy and scientific instrumentation, Michael Hallewell provides personal technical support to help customers select the right microscope for their application.
Personal assistance with equipment selection and configuration.
Installation and commissioning services available throughout the UK.
Practical user training and microscope application guidance.
Servicing, preventative maintenance and calibration support where applicable.
Product information: Specifications and available options depend on the selected configuration and may be changed by the manufacturer. Photographs may show optional accessories. Prices, lead times, delivery, warranty and installation arrangements will be confirmed in your written quotation.