Skip to product information
Genuine ASTEL SemiSyn catalogue example of carbon fibre wafer-handling end effector; quoted part may differ

SemiSyn Carbon Fibre Wafer Handling End Effectors & Robot Arms | Price on Request

Price on Request — please request a quotation below.

Request a quotation
TitleQuotation required

AUCKLAND SCIENTIFIC | SEMICONDUCTOR HANDLING SOLUTIONS

ASTEL / SemiSyn Carbon Fibre Wafer End Effectors & Robot Arms

Genuine SemiSyn-manufactured carbon-fibre replacements and custom components for wafer loading, semiconductor processing, wafer inspection and older unsupported handling systems.

PRICE ON REQUEST · UK supply and technical assistance

Keep existing wafer-handling equipment operating

End effectors are critical to safe, repeatable wafer transport. A worn or damaged arm can cause handling errors, unplanned downtime and potential wafer damage. For equipment with discontinued original parts, SemiSyn's historical designs and bespoke manufacturing capabilities provide an alternative route to refurbishment. Auckland Scientific works with ASTEL / SemiSyn to establish suitable parts for UK customers.

ASTEL SemiSyn genuine manufacturer image of carbon fibre end effector for semiconductor wafer handling

Why choose a carbon-fibre end effector?

  • Lightweight, rigid structure: carbon-fibre composites combine low mass with high stiffness, helping deliver accurate movement with reduced load on the handling mechanism.
  • Impact tolerance and dimensional stability: SemiSyn describes good shock resistance and reduced risk of permanent deformation compared with some traditional metal designs, subject to loading and design.
  • Potentially longer operating life: durable construction can help improve time between failures and reduce replacement costs and downtime, depending on actual operating conditions.
  • Low-particle handling: SemiSyn provides historical comparative contamination testing; the result depends on pad type, cleaning, maintenance and process.
  • Electrical properties: conductive carbon fibre can support electrostatic-charge management where the finished assembly and grounding arrangement are properly engineered.
  • Process-selected contact pads: options described include PTFE, PTFE/ceramic, polyimide (Kapton) and UHMW, subject to temperature, chemical and handling needs.
  • Support for legacy tools: manufacturer reference designs cover many microscope loaders, grinders, scrubbers, CMP and robotic wafer-handling systems.

Manufacturer technical information

From SemiSyn's January 2016 catalogue. These are reference specifications, not guaranteed figures for every component. Final values must be confirmed for the specific design and use case.

Reinforcement Bidirectional or unidirectional carbon fibre, 90–220 g/m²
Resin matrix Epoxy or phenolic
Material specific gravity Approximately 1.5 (carbon)
Elastic modulus (manufacturer stated) Carbon only: 28,000 kg/mm²; composite with matrix: 15,000 kg/mm²
Process temperature Catalogue references 80°C environment and short wafer exposure up to 300°C with Kapton pads; design-specific confirmation essential
Chemical resistance Described as good for CMP chemicals; not suitable for strong organic solvents
General dimensional tolerances External geometry ±0.2 mm maximum; planarity test 0.3 mm maximum
Inspection 100% checks described for finish, dimensions, planarity, assembly and functional vacuum test

The brochure also reports historical particle, outgassing and metallic contamination measurements under stated test conditions. These do not constitute a general cleanroom classification or guarantee for every configuration.

Browse genuine manufacturer model photographs and part references

The full list below reproduces all 81 part references in the available 2016 SemiSyn catalogue, grouped as on the original pages. Expand any section to see the original photographs and precise catalogue codes. These examples are not guaranteed current stock or drop-in OEM replacements.

Manufacturer models Applied Materials – Axcelis · 8 references

Original manufacturer catalogue photograph and reference codes (2016):

SemiSyn manufacturer catalogue page 6: genuine photographs of carbon fibre wafer-handling end effectors
Equipment brand Application/model SemiSyn reference
Applied Materials AMAT MIRRA (short) C15-AMTM1-1V
Applied Materials AMAT MIRRA MESA (long) C15-AMTM2-1V
Applied Materials AMAT MIRRA modified C15-AMTM3-1V
Applied Materials AMAT CVD DXZ C15-AMTDXZ1-1V
Applied Materials AMAT MIRRA TRACK C15-AMTMT-1V
Applied Materials AMAT (unspecified) C15-AMT6-1V
Axcelis GSD 200 C15-AXCG1S-1V
Axcelis GSD ULTRA C15-AXCG1L-1
Manufacturer models Canon – Disco · 5 references

Original manufacturer catalogue photograph and reference codes (2016):

SemiSyn manufacturer catalogue page 7: genuine photographs of carbon fibre wafer-handling end effectors
Equipment brand Application/model SemiSyn reference
Canon I5 C15-CNI5-1V
Canon EF 2+ C15-CNEF2-1V
Cybernetics Packager (versions vary) C15-CYB01-1V
Disco Grinder 6-inch C15-DSC01-1V
Disco Grinder 8-inch C15-DSC02-1V
Manufacturer models DNS – Ebara · 8 references

Original manufacturer catalogue photograph and reference codes (2016):

SemiSyn manufacturer catalogue page 8: genuine photographs of carbon fibre wafer-handling end effectors
Equipment brand Application/model SemiSyn reference
DNS AS2000 scrubber C15-DNAS2K1-1V
DNS DNS60 C15-DN60A1-1V
DNS DNS 60 — OEM P/N 2-F3-38335 C15-DN62-1V
DNS DNS 80 A — OEM P/N 2-F3-38538 C15-DN80A-1V
DNS SSK 200 (200 mm) C15-DNSK228-0M
DNS SK2000 C15-DNSK238-0M
DNS RF3 C15-DNSRF3-0M
Ebara OEM P/N 2003NN000249-101 C25-EB01-1V
Manufacturer models EVG – GSI Lumonics · 7 references

Original manufacturer catalogue photograph and reference codes (2016):

SemiSyn manufacturer catalogue page 9: genuine photographs of carbon fibre wafer-handling end effectors
Equipment brand Application/model SemiSyn reference
EVG Wafer tester — OEM P/N 970-288-2746 C13-EV001F-1V
EVG 150 Track C15-EV150-1V
EVG EE robot (also IVS System) C25-EV03-1V
Falcon Metrology tool C15-FLC01-1V
FSI Polaris arm — OEM P/N 420210-001 Rev.B C15-FSP01-1V
FSI Aluminium holder AL-PL2-H1
GSI Lumonics Laser end effector C15-GSLSR1-1V
Manufacturer models Hitachi – KLA Tencor · 7 references

Original manufacturer catalogue photograph and reference codes (2016):

SemiSyn manufacturer catalogue page 10: genuine photographs of carbon fibre wafer-handling end effectors
Equipment brand Application/model SemiSyn reference
Hitachi CD SEM, type 1 C15HT01-1V
Hitachi CD SEM, type 2 C15HT02-1V
Karl Suss GAMMA 6-inch C15-KSG61-1V
Karl Suss GAMMA 8-inch C15-KSG81-1V
KLA Tencor OEM P/N 52-0375 C15-KLT3-2V
KLA Tencor 8100 C15-KL8100-1V
KLA Tencor 2103 C15-KL2103-1V
Manufacturer models KLA Tencor – Nikon · 7 references

Original manufacturer catalogue photograph and reference codes (2016):

SemiSyn manufacturer catalogue page 11: genuine photographs of carbon fibre wafer-handling end effectors
Equipment brand Application/model SemiSyn reference
KLA Tencor SP1 — OEM P/N 0068627-000 / 366889 C15-KLSP1-1V
Leica INS 300 exchange arm — OEM P/N 020-611.017-004 C30-LKL8-2V
Leica Vistec INS 3300 loading arm C30-LKV33-1V
Lintec Tape remover end effector (micro-holes) C15-LNTR01-1V
Mactronix Exchange arm C60-MCXE01-2V
Mactronix Loading arm C15-MCXL01-1V
Nikon NWL6400 loading arm C13-NKLF1-1V
Manufacturer models Nikon · 7 references

Original manufacturer catalogue photograph and reference codes (2016):

SemiSyn manufacturer catalogue page 12: genuine photographs of carbon fibre wafer-handling end effectors
Equipment brand Application/model SemiSyn reference
Nikon Loading arm, right-hand reference (pair delivered); OEM P/N 4B019-048-AN C15-NKLMF1-1V
Nikon Loading arm — OEM P/N 4B006-106-AN C30-NKLQA1-1V
Nikon Stepper arm 6–8-inch — OEM P/N 4B001-383-A C15-NKS1L-1V
Nikon Vacuum chuck depo — OEM P/N 22-CTC 0050 C15-NKS2-1V
Nikon NWL860 exchange arm C45-NKL03-1V
Nikon NWL860 loading arm C15-NLKL86-1V
Nikon NWL200 loading arm (micro-holes/PTFE pad versions) C15-NKL200L-1V
Manufacturer models Nitto – Okamoto · 6 references

Original manufacturer catalogue photograph and reference codes (2016):

SemiSyn manufacturer catalogue page 13: genuine photographs of carbon fibre wafer-handling end effectors
Equipment brand Application/model SemiSyn reference
Nitto 8-inch detaper loading arm C15-NTD01-1V
Nitto 6-inch detaper loading arm C13-NTD02-1V
Novellus 04WP3M end effector C15-NOV01-1V
Nydeq Older Leica/Zeiss microscope loader C15-NQZ21-2V
Okamoto Grinder robot arm C15-OKMR01-1V
Okamoto Grinder C30-OKGN1-2V
Manufacturer models Olympus · 6 references

Original manufacturer catalogue photograph and reference codes (2016):

SemiSyn manufacturer catalogue page 14: genuine photographs of carbon fibre wafer-handling end effectors
Equipment brand Application/model SemiSyn reference
Olympus AL1 exchange arm C45-OY8S1-2V
Olympus AL1 loading arm C13-OYU1-1V
Olympus Microscope loader F arm C30-OYF1-1V
Olympus AL110 6-inch exchange arm C30-OYAL11E1-1V
Olympus AL110 8-inch loading arm C15-OLYAL11L1-1V
Olympus Microscope loader exchange arm C15-OLYML01-1V
Manufacturer models PVA TePla – SEZ · 7 references

Original manufacturer catalogue photograph and reference codes (2016):

SemiSyn manufacturer catalogue page 15: genuine photographs of carbon fibre wafer-handling end effectors
Equipment brand Application/model SemiSyn reference
PVA TePla Loading arm C15-PVA01L-1V
Rorze Robot end effector C15-RZR01-1V
Semitool RA100L C15-STRA1-0M
Semix Finger arm C15-SMX01-1V
SEZ Fork arm C15-SZF01-1V
SEZ Fork fingers — right C15-SZFR01-1V
SEZ Fork fingers — left C15-SZFL01-1V
Manufacturer models SEZ – TEL · 8 references

Original manufacturer catalogue photograph and reference codes (2016):

SemiSyn manufacturer catalogue page 16: genuine photographs of carbon fibre wafer-handling end effectors
Equipment brand Application/model SemiSyn reference
SEZ Robot arm long C15-SZVT201-1V
SEZ Robot arm short C15-SZR02S-1V
SEZ Dual robot arm C15-SZFL201-2V
SEZ DaVinci 12-inch robot arm C30-SZDV01-OM
SVG 90S 5-inch arm C15-SV90S5-1V
SVG 90S 6-inch arm C15-SV90S6-1V
Taikoku Tape remover C15-TKL01-1V
TEL MK5 finger arm C15-TL501-1V
Manufacturer models Veeco Metrology – Zeiss · 5 references

Original manufacturer catalogue photograph and reference codes (2016):

SemiSyn manufacturer catalogue page 17: genuine photographs of carbon fibre wafer-handling end effectors
Equipment brand Application/model SemiSyn reference
Veeco Metrology 200 mm C30-VF2-1V
Veeco Metrology 300 mm C30-V301-1V
Veeco Metrology VX310 C30-VMVX3-1V
Zeiss Axiotron loader 6-inch C15-AX106-1V
Zeiss Axiotron loader 8-inch (micro-holes option) C15-AX108-1V

Custom manufacture and replacement of obsolete designs

For a component not listed above, SemiSyn describes CAD design and CNC manufacture of prototypes using an existing part (a complete damaged example may be suitable) or technical drawings. Design and carbon-fibre specification are selected after review. Production feasibility, minimum quantities, prototype charges and lead times are quoted individually.

Request a quotation from Auckland Scientific

To identify the right component, please include the equipment brand and model, SemiSyn reference or original part number, wafer size, photos or measured drawings, contact pad and vacuum arrangement, operating conditions, quantities required and delivery location. We will confirm suitability, manufacture options and current pricing with the supplier.

No public prices: carbon-fibre material costs vary and quotations have limited validity, generally no more than two to three months.

Request a quotation

Email office@auckland-scientific.co.uk

Historical manufacturer catalogue dated January 2016. Third-party company names and equipment models are used only to identify intended applications. Auckland Scientific does not assert OEM affiliation or interchangeability. Manufacture, interface fit, material choice, ESD behaviour, chemical compatibility and qualification must be checked before an order.

Request a quotation