AUCKLAND SCIENTIFIC | SEMICONDUCTOR HANDLING SOLUTIONS
ASTEL / SemiSyn Carbon Fibre Wafer End Effectors & Robot Arms
Genuine SemiSyn-manufactured carbon-fibre replacements and custom components for wafer loading, semiconductor processing, wafer inspection and older unsupported handling systems.
PRICE ON REQUEST · UK supply and technical assistance
Keep existing wafer-handling equipment operating
End effectors are critical to safe, repeatable wafer transport. A worn or damaged arm can cause handling errors, unplanned downtime and potential wafer damage. For equipment with discontinued original parts, SemiSyn's historical designs and bespoke manufacturing capabilities provide an alternative route to refurbishment. Auckland Scientific works with ASTEL / SemiSyn to establish suitable parts for UK customers.
Why choose a carbon-fibre end effector?
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Lightweight, rigid structure: carbon-fibre composites combine low mass with high stiffness, helping deliver accurate movement with reduced load on the handling mechanism.
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Impact tolerance and dimensional stability: SemiSyn describes good shock resistance and reduced risk of permanent deformation compared with some traditional metal designs, subject to loading and design.
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Potentially longer operating life: durable construction can help improve time between failures and reduce replacement costs and downtime, depending on actual operating conditions.
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Low-particle handling: SemiSyn provides historical comparative contamination testing; the result depends on pad type, cleaning, maintenance and process.
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Electrical properties: conductive carbon fibre can support electrostatic-charge management where the finished assembly and grounding arrangement are properly engineered.
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Process-selected contact pads: options described include PTFE, PTFE/ceramic, polyimide (Kapton) and UHMW, subject to temperature, chemical and handling needs.
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Support for legacy tools: manufacturer reference designs cover many microscope loaders, grinders, scrubbers, CMP and robotic wafer-handling systems.
Manufacturer technical information
From SemiSyn's January 2016 catalogue. These are reference specifications, not guaranteed figures for every component. Final values must be confirmed for the specific design and use case.
| Reinforcement |
Bidirectional or unidirectional carbon fibre, 90–220 g/m² |
| Resin matrix |
Epoxy or phenolic |
| Material specific gravity |
Approximately 1.5 (carbon) |
| Elastic modulus (manufacturer stated) |
Carbon only: 28,000 kg/mm²; composite with matrix: 15,000 kg/mm² |
| Process temperature |
Catalogue references 80°C environment and short wafer exposure up to 300°C with Kapton pads; design-specific confirmation essential |
| Chemical resistance |
Described as good for CMP chemicals; not suitable for strong organic solvents |
| General dimensional tolerances |
External geometry ±0.2 mm maximum; planarity test 0.3 mm maximum |
| Inspection |
100% checks described for finish, dimensions, planarity, assembly and functional vacuum test |
The brochure also reports historical particle, outgassing and metallic contamination measurements under stated test conditions. These do not constitute a general cleanroom classification or guarantee for every configuration.
Browse genuine manufacturer model photographs and part references
The full list below reproduces all 81 part references in the available 2016 SemiSyn catalogue, grouped as on the original pages. Expand any section to see the original photographs and precise catalogue codes. These examples are not guaranteed current stock or drop-in OEM replacements.
Manufacturer models Applied Materials – Axcelis · 8 references
Original manufacturer catalogue photograph and reference codes (2016):

| Equipment brand |
Application/model |
SemiSyn reference |
| Applied Materials |
AMAT MIRRA (short) |
C15-AMTM1-1V |
| Applied Materials |
AMAT MIRRA MESA (long) |
C15-AMTM2-1V |
| Applied Materials |
AMAT MIRRA modified |
C15-AMTM3-1V |
| Applied Materials |
AMAT CVD DXZ |
C15-AMTDXZ1-1V |
| Applied Materials |
AMAT MIRRA TRACK |
C15-AMTMT-1V |
| Applied Materials |
AMAT (unspecified) |
C15-AMT6-1V |
| Axcelis |
GSD 200 |
C15-AXCG1S-1V |
| Axcelis |
GSD ULTRA |
C15-AXCG1L-1 |
Manufacturer models Canon – Disco · 5 references
Original manufacturer catalogue photograph and reference codes (2016):

| Equipment brand |
Application/model |
SemiSyn reference |
| Canon |
I5 |
C15-CNI5-1V |
| Canon |
EF 2+ |
C15-CNEF2-1V |
| Cybernetics |
Packager (versions vary) |
C15-CYB01-1V |
| Disco |
Grinder 6-inch |
C15-DSC01-1V |
| Disco |
Grinder 8-inch |
C15-DSC02-1V |
Manufacturer models DNS – Ebara · 8 references
Original manufacturer catalogue photograph and reference codes (2016):

| Equipment brand |
Application/model |
SemiSyn reference |
| DNS |
AS2000 scrubber |
C15-DNAS2K1-1V |
| DNS |
DNS60 |
C15-DN60A1-1V |
| DNS |
DNS 60 — OEM P/N 2-F3-38335 |
C15-DN62-1V |
| DNS |
DNS 80 A — OEM P/N 2-F3-38538 |
C15-DN80A-1V |
| DNS |
SSK 200 (200 mm) |
C15-DNSK228-0M |
| DNS |
SK2000 |
C15-DNSK238-0M |
| DNS |
RF3 |
C15-DNSRF3-0M |
| Ebara |
OEM P/N 2003NN000249-101 |
C25-EB01-1V |
Manufacturer models EVG – GSI Lumonics · 7 references
Original manufacturer catalogue photograph and reference codes (2016):

| Equipment brand |
Application/model |
SemiSyn reference |
| EVG |
Wafer tester — OEM P/N 970-288-2746 |
C13-EV001F-1V |
| EVG |
150 Track |
C15-EV150-1V |
| EVG |
EE robot (also IVS System) |
C25-EV03-1V |
| Falcon |
Metrology tool |
C15-FLC01-1V |
| FSI |
Polaris arm — OEM P/N 420210-001 Rev.B |
C15-FSP01-1V |
| FSI |
Aluminium holder |
AL-PL2-H1 |
| GSI Lumonics |
Laser end effector |
C15-GSLSR1-1V |
Manufacturer models Hitachi – KLA Tencor · 7 references
Original manufacturer catalogue photograph and reference codes (2016):

| Equipment brand |
Application/model |
SemiSyn reference |
| Hitachi |
CD SEM, type 1 |
C15HT01-1V |
| Hitachi |
CD SEM, type 2 |
C15HT02-1V |
| Karl Suss |
GAMMA 6-inch |
C15-KSG61-1V |
| Karl Suss |
GAMMA 8-inch |
C15-KSG81-1V |
| KLA Tencor |
OEM P/N 52-0375 |
C15-KLT3-2V |
| KLA Tencor |
8100 |
C15-KL8100-1V |
| KLA Tencor |
2103 |
C15-KL2103-1V |
Manufacturer models KLA Tencor – Nikon · 7 references
Original manufacturer catalogue photograph and reference codes (2016):

| Equipment brand |
Application/model |
SemiSyn reference |
| KLA Tencor |
SP1 — OEM P/N 0068627-000 / 366889 |
C15-KLSP1-1V |
| Leica |
INS 300 exchange arm — OEM P/N 020-611.017-004 |
C30-LKL8-2V |
| Leica Vistec |
INS 3300 loading arm |
C30-LKV33-1V |
| Lintec |
Tape remover end effector (micro-holes) |
C15-LNTR01-1V |
| Mactronix |
Exchange arm |
C60-MCXE01-2V |
| Mactronix |
Loading arm |
C15-MCXL01-1V |
| Nikon |
NWL6400 loading arm |
C13-NKLF1-1V |
Manufacturer models Nikon · 7 references
Original manufacturer catalogue photograph and reference codes (2016):

| Equipment brand |
Application/model |
SemiSyn reference |
| Nikon |
Loading arm, right-hand reference (pair delivered); OEM P/N 4B019-048-AN |
C15-NKLMF1-1V |
| Nikon |
Loading arm — OEM P/N 4B006-106-AN |
C30-NKLQA1-1V |
| Nikon |
Stepper arm 6–8-inch — OEM P/N 4B001-383-A |
C15-NKS1L-1V |
| Nikon |
Vacuum chuck depo — OEM P/N 22-CTC 0050 |
C15-NKS2-1V |
| Nikon |
NWL860 exchange arm |
C45-NKL03-1V |
| Nikon |
NWL860 loading arm |
C15-NLKL86-1V |
| Nikon |
NWL200 loading arm (micro-holes/PTFE pad versions) |
C15-NKL200L-1V |
Manufacturer models Nitto – Okamoto · 6 references
Original manufacturer catalogue photograph and reference codes (2016):

| Equipment brand |
Application/model |
SemiSyn reference |
| Nitto |
8-inch detaper loading arm |
C15-NTD01-1V |
| Nitto |
6-inch detaper loading arm |
C13-NTD02-1V |
| Novellus |
04WP3M end effector |
C15-NOV01-1V |
| Nydeq |
Older Leica/Zeiss microscope loader |
C15-NQZ21-2V |
| Okamoto |
Grinder robot arm |
C15-OKMR01-1V |
| Okamoto |
Grinder |
C30-OKGN1-2V |
Manufacturer models Olympus · 6 references
Original manufacturer catalogue photograph and reference codes (2016):

| Equipment brand |
Application/model |
SemiSyn reference |
| Olympus |
AL1 exchange arm |
C45-OY8S1-2V |
| Olympus |
AL1 loading arm |
C13-OYU1-1V |
| Olympus |
Microscope loader F arm |
C30-OYF1-1V |
| Olympus |
AL110 6-inch exchange arm |
C30-OYAL11E1-1V |
| Olympus |
AL110 8-inch loading arm |
C15-OLYAL11L1-1V |
| Olympus |
Microscope loader exchange arm |
C15-OLYML01-1V |
Manufacturer models PVA TePla – SEZ · 7 references
Original manufacturer catalogue photograph and reference codes (2016):

| Equipment brand |
Application/model |
SemiSyn reference |
| PVA TePla |
Loading arm |
C15-PVA01L-1V |
| Rorze |
Robot end effector |
C15-RZR01-1V |
| Semitool |
RA100L |
C15-STRA1-0M |
| Semix |
Finger arm |
C15-SMX01-1V |
| SEZ |
Fork arm |
C15-SZF01-1V |
| SEZ |
Fork fingers — right |
C15-SZFR01-1V |
| SEZ |
Fork fingers — left |
C15-SZFL01-1V |
Manufacturer models SEZ – TEL · 8 references
Original manufacturer catalogue photograph and reference codes (2016):

| Equipment brand |
Application/model |
SemiSyn reference |
| SEZ |
Robot arm long |
C15-SZVT201-1V |
| SEZ |
Robot arm short |
C15-SZR02S-1V |
| SEZ |
Dual robot arm |
C15-SZFL201-2V |
| SEZ |
DaVinci 12-inch robot arm |
C30-SZDV01-OM |
| SVG |
90S 5-inch arm |
C15-SV90S5-1V |
| SVG |
90S 6-inch arm |
C15-SV90S6-1V |
| Taikoku |
Tape remover |
C15-TKL01-1V |
| TEL |
MK5 finger arm |
C15-TL501-1V |
Manufacturer models Veeco Metrology – Zeiss · 5 references
Original manufacturer catalogue photograph and reference codes (2016):

| Equipment brand |
Application/model |
SemiSyn reference |
| Veeco Metrology |
200 mm |
C30-VF2-1V |
| Veeco Metrology |
300 mm |
C30-V301-1V |
| Veeco Metrology |
VX310 |
C30-VMVX3-1V |
| Zeiss |
Axiotron loader 6-inch |
C15-AX106-1V |
| Zeiss |
Axiotron loader 8-inch (micro-holes option) |
C15-AX108-1V |
Custom manufacture and replacement of obsolete designs
For a component not listed above, SemiSyn describes CAD design and CNC manufacture of prototypes using an existing part (a complete damaged example may be suitable) or technical drawings. Design and carbon-fibre specification are selected after review. Production feasibility, minimum quantities, prototype charges and lead times are quoted individually.
Request a quotation from Auckland Scientific
To identify the right component, please include the equipment brand and model, SemiSyn reference or original part number, wafer size, photos or measured drawings, contact pad and vacuum arrangement, operating conditions, quantities required and delivery location. We will confirm suitability, manufacture options and current pricing with the supplier.
No public prices: carbon-fibre material costs vary and quotations have limited validity, generally no more than two to three months.
Request a quotationEmail office@auckland-scientific.co.uk
Historical manufacturer catalogue dated January 2016. Third-party company names and equipment models are used only to identify intended applications. Auckland Scientific does not assert OEM affiliation or interchangeability. Manufacture, interface fit, material choice, ESD behaviour, chemical compatibility and qualification must be checked before an order.